Performance of the stud bump bonding (SBB) process in comparison to solder flip chip technology

W. Reinert, T. Harder
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引用次数: 14

Abstract

In flip chip on board, a flip chip packaging technology, a number of assembly techniques have been proposed using different bump materials, different techniques for the bump application and various methods for the electrical interconnection. Among these, the Stud Bump Bonding (SBB) process, which is widely used in Japan also for high volume production, is very interesting for several reasons and therefore is discussed in this paper. The stud bump bonding process uses Au bumps which are applied mechanically on the wafer or on the chip using a thermosonic ball bonder enabling fine pitch bumping. The process works with available chips, having peripheral bond pads of a pitch down to 80 /spl mu/m, and does not need an under bump metallization (UBM). The SBB process with Au bumps uses mainly isotropically conductive adhesive (ICA) joining. The adhesive is applied by dip transfer. In the present work the total SBB process is evaluated. Besides the bumping, the flip chip assembly process covering the dip transfer of conductive adhesive, the pick and place as well as the underfill process are investigated with special emphasis on process automation. The reliability evaluation concentrates on thermo-mechanical and corrosion effects. The SBB process is compared to solder flip chip technology using solder bumps which are applied by the stencil printing of ultra-fine-pitch solder paste.
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螺栓碰撞键合(SBB)工艺的性能与焊接倒装芯片技术的比较
在板上倒装芯片(flip chip on board)这一倒装芯片封装技术中,已经提出了许多使用不同凸点材料的组装技术、用于凸点应用的不同技术以及各种电气互连方法。其中,螺柱碰撞键合(SBB)工艺,广泛应用于日本也大批量生产,是非常有趣的几个原因,因此本文讨论。螺柱碰撞键合工艺使用金碰撞,金碰撞使用热超声球键合机机械地应用于晶圆或芯片上,从而实现精细的间距碰撞。该工艺适用于现有的芯片,具有低至80 /spl μ m /m的外围键合垫,并且不需要凹凸下金属化(UBM)。带金凸起的SBB工艺主要使用各向同性导电胶(ICA)连接。胶粘剂是用浸渍转印的方式涂上去的。在本工作中,对整个SBB过程进行了评估。除了碰撞之外,还研究了倒装芯片的组装过程,包括导电胶粘剂的浸渍转移,拾取和放置以及下填过程,并特别强调了过程自动化。可靠性评估主要集中在热机械效应和腐蚀效应上。将SBB工艺与使用锡点凸点的锡点倒装芯片技术进行了比较,锡点凸点是由超细间距锡膏的模板印刷应用的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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