LT GaAs semi-insulating layers applied in vertical-cavity surface-emitting lasers

K. Reginski, A. Malag, D. Radomska, M. Bugajski
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Abstract

In this paper we report on the optimization of the MBE growth process for obtaining semi-insulating LT-GaAs layers applied in vertical-cavity surface-emitting-lasers. The technological conditions for growing LT-GaAs layers have been found and test processes for growing the laser structure at the optimum conditions have been performed. Although numerous optoelectronic applications of LT GaAs have been demonstrated we believe that this is one of the rare cases when LT GaAs has been used in semiconductor laser technology.
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垂直腔面发射激光器中低温砷化镓半绝缘层的研究
本文报道了用于垂直腔面发射激光器的半绝缘LT-GaAs层的MBE生长工艺的优化。找到了生长LT-GaAs层的工艺条件,并进行了在最佳条件下生长激光结构的测试过程。虽然已经证明了LT GaAs的许多光电应用,但我们相信这是LT GaAs在半导体激光技术中使用的罕见案例之一。
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