De-embedding and electromagnetic simulation calibration of on-wafer passive devices for millimeter wave integrated circuit design support

Abstract

In this paper, on-wafer de-embedding methods for passive components are evaluated for millimeter wave integrated circuit (MMW IC) design support. An electromagnetic simulation aided de-embedding (EMSAD) technique is proposed. The electromagnetic model is calibrated by matching the open-short de-embedded measurement at relatively lower frequencies. A set of Ground Coplanar Waveguide (GCPW) test structures fabricated on HLMC 40nm RF CMOS process are used for the investigation. The results of the proposed technique are used as reference for de-embedding of passive components at millimeter wave frequencies. As a result, the open-short de-embedding method is found to lose its accuracy above 60GHz in this work.