Correlation Between Low-frequency Noise Overshoot In SOI MOSFETs And Frequency Dependence Of Floating Body Effect

Tseng, Huang, Babcock, Ford, Woo
{"title":"Correlation Between Low-frequency Noise Overshoot In SOI MOSFETs And Frequency Dependence Of Floating Body Effect","authors":"Tseng, Huang, Babcock, Ford, Woo","doi":"10.1109/VLSIT.1997.623714","DOIUrl":null,"url":null,"abstract":"In this paper, a new mechanism is proposed to explain the well-known kink-related noise overshoot in SO1 MOSFETs. We found that there is a correlation between the frequency dependence of the kink’s onset voltage and the characteristic frequency (ao) dependence on drain bias of Lorentzian-like noise overshoot. It was concluded that the noise overshoot is due to the frequency dependence of floating body effect, which amplifies the noise arising from electronic tunneling transitions ( zT = 2n/w,) between front interfacial oxide traps and the channel. Introduction Recently SO1 MOSFEiTs have been proposed as a candidate for high speed communication applications. Low-frequency noise is an important consideration for these analog circuits. For example, low-frequency noise can be up-converted in RF mixers and oscillators, resulting in phase noise [ l ] . Due to the floating body, SO1 MOSFETs exhibit a low frequency kink-related noise overshoot, which has a Lorentzian spectrum: a flat low-frequency plateau, with constant amplitude, followed by a l’ roll-off, illustrated in Fig. 1. Different mechanisms were proposed to explain this excess noise, such as the trap-assisted generation-recombination noise model [2] and the G-R noise induced by back interface state [3]. However, these models cannot completely explain the characteristic frequency (wo) dependence on drain bias of overshoot noise, as shown in Fig. 4. In this paper we propose another mechanism to explain the above noise overshoct phenomenon. A similar noise behavior was also found in bodytied devices, but the amplitude is significantly reduced. Experimental Result A. Device description and low-frequency noise measurements Near fully depleted thin film SO1 nMOSFETs were used in the study [4]. An extra p+ implant step is applied on the source to form sourcebody-tied (SB-tied) SO1 nMOSFETs. SB-tied devices eliminate the kink at the output characteristics as shown in Fig. 2. Low-frequency noise measurements were made using an HP 3561A Dynamic Signal Analyzer with the gate electrode of the MOSFET ac shorted to ground by a capacitor. The output noise power is then transferred to inputreferred gate noise power. B. Drain bias dependence of noise overshoot in the kink region The devices were biased in the saturation region with low VGT, where the flicker noise is dominated by the number fluctuation model [5]. The Lorentzian spectrum noise overshoot was observed in the floating body SO1 nMOSFET (Fig. 4.a). As bias voltage increases, 0, increases and the noise level of the plateau decreases. Plotting the frequency times S,, versus frequency (Fig. 4.b), the characteristic frequency (w,) on drain bias could be determined and listed in Table 1. It is important to note that such noise overshoot behavior exists even for body-tied devices. The same drain bias dependence phenomena were observed (Fig. 5 ) with smaller overshoot amplitude and weaker drain bias dependence of a,,. Discussion C. Frequency dependence offloating body efect Onset voltage of the kink effect, which occurs as body voltage changes from low to high state, increases with frequency as illustrated in Fig. 3. This is due to the sourceibody junction capacitance acting as a low pass filter for the holes [6] . In order to suppress the floating body induced instability, SB-tied SO1 devices were fabricated without the I-V kink characteristics. However, these devices still show a smaller Lorentzian-like noise overshoot (ASvG) and weaker drain bias dependence of 0,. This implies that the floating body effect, which is due to body charging, still occurs as the body ties do not provide a zero impedance path for the holes. D. The correlation between frequency dependence of the kink effect and drain bias dependence of CO, Coupled wo dependence on drain bias (0, increases as VDs increases) with the frequency dependence of kink’s onset voltage (V&) increases as frequency increases), it suggests that there is a strong correlation between kink’s onset voltage and noise overshoot’s coo. Alternatively, in the frequency domain, at a constant bias there is a frequency (ao) corresponding to the kink’s onset voltage where body voltage quickly changes. The power spectral density of the fluctuation in the number of trapped electrons in the gate oxide(AV, AE) is given by [5], where zT = 2x/0,. Integrating the noise spectrum, the flicker noise (U’ given by the number fluctuation model can be obtained. Based on the correlation established above, the mechanism of noise overshoot can be explain as follows. At a constant drain bias larger than the DC I n k ’ s onset voltage, there is a frequency w0(VDs) at which body voltage induces the kink effect and amplifies the signal of frequency a,, in the channel. It enhances the noise event in (1) by a gain factor of A(w,) with characteristic time equal to zT (= 2nlw,). Finally, the total drain noise power is given by, 1 1 1 S,, = C , X + ( A 1 ) .C,X--. 2 ’ (2 ) f 1 + (w/wn) where C1, C2 are constants. The noise spectrum (2) explains the Lorentzian-like overshoot spectrum and the excess noise reduction as V,, increases. It can also predict the result by the spot noise analysis that as frequency increases, the noise overshoot’s peak shifts toward higher VDs and its amplitude reduces. Conclusion This paper presents the mechanism of the kink-related noise overshoot. It is due to the frequency dependence of the floating body effect which amplifies the tunneling noise with characteristic frequency respective to the frequency at which the kink occurs for a given bias voltage. Therefore, the key to avoiding the Lorentzian-like noise overshoot spectrum is to either suppress the floating body effect or optimize CO,, with the 99 4-93081 3-75-1 I97 1997 Symposium on VLSl Technology Digest of Technical Papers Floating body SO1 nMOS vDS fo ( q)/2x) 0.75V _ _","PeriodicalId":414778,"journal":{"name":"1997 Symposium on VLSI Technology","volume":"120 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 Symposium on VLSI Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIT.1997.623714","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 15

Abstract

In this paper, a new mechanism is proposed to explain the well-known kink-related noise overshoot in SO1 MOSFETs. We found that there is a correlation between the frequency dependence of the kink’s onset voltage and the characteristic frequency (ao) dependence on drain bias of Lorentzian-like noise overshoot. It was concluded that the noise overshoot is due to the frequency dependence of floating body effect, which amplifies the noise arising from electronic tunneling transitions ( zT = 2n/w,) between front interfacial oxide traps and the channel. Introduction Recently SO1 MOSFEiTs have been proposed as a candidate for high speed communication applications. Low-frequency noise is an important consideration for these analog circuits. For example, low-frequency noise can be up-converted in RF mixers and oscillators, resulting in phase noise [ l ] . Due to the floating body, SO1 MOSFETs exhibit a low frequency kink-related noise overshoot, which has a Lorentzian spectrum: a flat low-frequency plateau, with constant amplitude, followed by a l’ roll-off, illustrated in Fig. 1. Different mechanisms were proposed to explain this excess noise, such as the trap-assisted generation-recombination noise model [2] and the G-R noise induced by back interface state [3]. However, these models cannot completely explain the characteristic frequency (wo) dependence on drain bias of overshoot noise, as shown in Fig. 4. In this paper we propose another mechanism to explain the above noise overshoct phenomenon. A similar noise behavior was also found in bodytied devices, but the amplitude is significantly reduced. Experimental Result A. Device description and low-frequency noise measurements Near fully depleted thin film SO1 nMOSFETs were used in the study [4]. An extra p+ implant step is applied on the source to form sourcebody-tied (SB-tied) SO1 nMOSFETs. SB-tied devices eliminate the kink at the output characteristics as shown in Fig. 2. Low-frequency noise measurements were made using an HP 3561A Dynamic Signal Analyzer with the gate electrode of the MOSFET ac shorted to ground by a capacitor. The output noise power is then transferred to inputreferred gate noise power. B. Drain bias dependence of noise overshoot in the kink region The devices were biased in the saturation region with low VGT, where the flicker noise is dominated by the number fluctuation model [5]. The Lorentzian spectrum noise overshoot was observed in the floating body SO1 nMOSFET (Fig. 4.a). As bias voltage increases, 0, increases and the noise level of the plateau decreases. Plotting the frequency times S,, versus frequency (Fig. 4.b), the characteristic frequency (w,) on drain bias could be determined and listed in Table 1. It is important to note that such noise overshoot behavior exists even for body-tied devices. The same drain bias dependence phenomena were observed (Fig. 5 ) with smaller overshoot amplitude and weaker drain bias dependence of a,,. Discussion C. Frequency dependence offloating body efect Onset voltage of the kink effect, which occurs as body voltage changes from low to high state, increases with frequency as illustrated in Fig. 3. This is due to the sourceibody junction capacitance acting as a low pass filter for the holes [6] . In order to suppress the floating body induced instability, SB-tied SO1 devices were fabricated without the I-V kink characteristics. However, these devices still show a smaller Lorentzian-like noise overshoot (ASvG) and weaker drain bias dependence of 0,. This implies that the floating body effect, which is due to body charging, still occurs as the body ties do not provide a zero impedance path for the holes. D. The correlation between frequency dependence of the kink effect and drain bias dependence of CO, Coupled wo dependence on drain bias (0, increases as VDs increases) with the frequency dependence of kink’s onset voltage (V&) increases as frequency increases), it suggests that there is a strong correlation between kink’s onset voltage and noise overshoot’s coo. Alternatively, in the frequency domain, at a constant bias there is a frequency (ao) corresponding to the kink’s onset voltage where body voltage quickly changes. The power spectral density of the fluctuation in the number of trapped electrons in the gate oxide(AV, AE) is given by [5], where zT = 2x/0,. Integrating the noise spectrum, the flicker noise (U’ given by the number fluctuation model can be obtained. Based on the correlation established above, the mechanism of noise overshoot can be explain as follows. At a constant drain bias larger than the DC I n k ’ s onset voltage, there is a frequency w0(VDs) at which body voltage induces the kink effect and amplifies the signal of frequency a,, in the channel. It enhances the noise event in (1) by a gain factor of A(w,) with characteristic time equal to zT (= 2nlw,). Finally, the total drain noise power is given by, 1 1 1 S,, = C , X + ( A 1 ) .C,X--. 2 ’ (2 ) f 1 + (w/wn) where C1, C2 are constants. The noise spectrum (2) explains the Lorentzian-like overshoot spectrum and the excess noise reduction as V,, increases. It can also predict the result by the spot noise analysis that as frequency increases, the noise overshoot’s peak shifts toward higher VDs and its amplitude reduces. Conclusion This paper presents the mechanism of the kink-related noise overshoot. It is due to the frequency dependence of the floating body effect which amplifies the tunneling noise with characteristic frequency respective to the frequency at which the kink occurs for a given bias voltage. Therefore, the key to avoiding the Lorentzian-like noise overshoot spectrum is to either suppress the floating body effect or optimize CO,, with the 99 4-93081 3-75-1 I97 1997 Symposium on VLSl Technology Digest of Technical Papers Floating body SO1 nMOS vDS fo ( q)/2x) 0.75V _ _
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SOI mosfet低频噪声超调与浮体效应频率依赖性的关系
本文提出了一种新的机制来解释SO1 mosfet中众所周知的扭结相关噪声超调。我们发现,在扭结起始电压的频率依赖性和洛伦兹类噪声过调的漏极偏置的特征频率依赖性之间存在相关性。结果表明,噪声超调是由于浮体效应的频率依赖性导致的,浮体效应放大了前界面氧化物陷阱与通道之间的电子隧穿跃迁(zT = 2n/w)产生的噪声。近年来,SO1 mosfit被提出作为高速通信应用的候选器件。低频噪声是这些模拟电路的一个重要考虑因素。例如,低频噪声可以在射频混频器和振荡器中上转换,从而产生相位噪声[1]。由于浮体,SO1 mosfet表现出低频扭结相关的噪声超调,其具有洛伦兹谱:平坦的低频平台,具有恒定的振幅,随后是l '滚降,如图1所示。提出了不同的机制来解释这种过量噪声,如陷阱辅助产生-重组噪声模型[2]和回界面状态[3]引起的G-R噪声。然而,这些模型不能完全解释特征频率(2)对超调噪声漏极偏置的依赖,如图4所示。本文提出了另一种机制来解释上述噪声过冲现象。类似的噪声行为也被发现在体束缚装置,但幅度是显着降低。实验结果A.器件描述和低频噪声测量在研究中使用了几乎完全耗尽的薄膜SO1 nmosfet。在源上施加一个额外的p+植入步骤,形成源体捆绑(sb捆绑)SO1 nmosfet。如图2所示,sb -tie器件消除了输出特性处的扭结。低频噪声测量使用HP 3561A动态信号分析仪进行,MOSFET交流的栅极被电容器短路到地。然后将输出噪声功率转换为输入栅极噪声功率。器件偏置在低VGT的饱和区,其中闪烁噪声主要由数波动模型[5]控制。在浮体SO1 nMOSFET中观察到洛伦兹谱噪声超调(图4.a)。随着偏置电压的增大,0增大,平台噪声电平减小。绘制频率乘以S,与频率的关系(图4.b),可以确定漏极偏置的特征频率w,并在表1中列出。重要的是要注意,这种噪声超调行为甚至存在于体系装置中。同样的漏极偏置依赖现象(图5),超调幅度更小,漏极偏置依赖a,,更弱。随着体电压由低状态到高状态的变化,发生扭结效应的起始电压随频率增加,如图3所示。这是由于源体结电容作为一个低通滤波器的孔[6]。为了抑制浮体引起的失稳,制备了不带I-V扭结特性的sb系SO1器件。然而,这些器件仍然显示出较小的洛伦兹类噪声超调(ASvG)和较弱的漏极偏置依赖性为0。这意味着浮体效应,这是由于体充电,仍然发生,因为体连接不提供零阻抗路径的孔。D.扭结效应的频率依赖性与CO的漏极偏置依赖性之间的相关性,加上对漏极偏置的依赖性(0,随着VDs的增加而增加)与扭结开始电压的频率依赖性(V&)随着频率的增加而增加,这表明扭结开始电压与噪声超调的coo之间存在很强的相关性。或者,在频域中,在恒定的偏置下,有一个频率(ao)对应于扭结的起始电压,其中体电压迅速变化。栅极氧化物(AV, AE)中捕获电子数波动的功率谱密度由[5]给出,其中zT = 2x/0,。对噪声谱进行积分,得到由数波动模型给出的闪烁噪声U '。基于上述相关性,噪声超调的机理可以解释为:当漏极偏置大于直流电压时,存在一个频率w0(VDs),在该频率下,体电压诱导通道中频率a,的信号发生弯曲效应并放大。它将(1)中的噪声事件增强了增益因子a (w,),特征时间为zT (= 2nlw,)。最后,总漏极噪声功率为,1 1 1 S,, = C,X + (a1) .C,X——。 2 ' (2) f1 + (w/wn)其中C1和C2是常数。噪声谱(2)解释了类洛伦兹超调谱和随着V的增加而产生的过量噪声降噪。通过点噪声分析也可以预测出随着频率的增加,噪声超调的峰值向更高的VDs移动,其幅度减小的结果。结论本文阐述了扭结相关噪声超调的机理。这是由于浮体效应的频率依赖性,在给定的偏置电压下,浮体效应放大了隧道噪声,其特征频率对应于发生扭结的频率。因此,避免类洛伦兹噪声超调频谱的关键是抑制浮体效应或优化CO,与99 4-93081 3-75-1 I97 1997 VLSl技术研讨会技术论文摘要浮体SO1 nMOS vDS to (q)/2x) 0.75V _ _
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