Self-powered Photodetectors based on the Ga2O3/n-GaAs

V. Kalygina, O.S. Kisleleva, B. Kushnarev, Y. Petrova, A. V. Almaev, V. Oleinik, A. Tsymbalov
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Abstract

The electrical and photoelectric characteristics of the Ga2O3/n-GaAs structures have been studied. A gallium oxide film was obtained by RF-magnetron sputtering on n-GaAs epitaxial layers with a concentration of Nd = 9.5ˑ1014 cm-3. The thickness of the oxide film was 120 nm. Measurements at a frequency of 106 Hz have shown that the capacitance-voltage and voltage-siemens dependences are described by curves characteristic of metal-insulator-semiconductor structures and exhibit low sensitivity to radiation with λ = 254 nm. The samples exhibit the properties of a photodiode and are able to work offline when operating on a constant signal. The photoelectric characteristics of the detectors during continuous exposure to radiation with λ = 254 nm are determined by the high density of traps at the Ga2O3/GaAs interface and in the bulk of the oxide film.
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基于Ga2O3/n-GaAs的自供电光电探测器
研究了Ga2O3/n-GaAs结构的电学和光电特性。采用射频磁控溅射技术在n-GaAs外延层上制备了浓度为Nd = 9.5±1014 cm-3的氧化镓薄膜。氧化膜厚度为120 nm。在106 Hz频率下的测量表明,电容-电压和电压-西门子依赖关系由金属-绝缘体-半导体结构的曲线特征描述,并且对λ = 254 nm的辐射表现出低灵敏度。样品表现出光电二极管的特性,并且能够在恒定信号下离线工作。在λ = 254 nm的连续辐射下,探测器的光电特性是由Ga2O3/GaAs界面和氧化膜中高密度的陷阱决定的。
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