S. Bachowski, D. Bliss, B. Ahern, R. M. Hilton, J. Adamski, D. Carlson
{"title":"Magnetically stabilized Kyropoulos and Czochralski growth of InP","authors":"S. Bachowski, D. Bliss, B. Ahern, R. M. Hilton, J. Adamski, D. Carlson","doi":"10.1109/ICIPRM.1990.202982","DOIUrl":null,"url":null,"abstract":"A comparison is made between the magnetic liquid-encapsulated-Kyropoulos (MLEK) method and the magnetic liquid-encapsulated-Czochralski (MLEC) method for bulk growth of InP. The application of a magnetic field was observed to alter the interface shape and doping distribution in both LEK and LEC. For MLEC with the proper magnetic field strength, dopant striations can be reduced. In contrast, for MLEK with corotation, striations remained unchanged when a magnetic field was applied. However, for MLEK growth down with no rotation a uniform local dopant distribution with no growth striations is apparent. It is confirmed that MLEK growth in a low-gradient environment yields low-dislocation-density crystals.<<ETX>>","PeriodicalId":138960,"journal":{"name":"International Conference on Indium Phosphide and Related Materials","volume":"77 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Indium Phosphide and Related Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1990.202982","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
A comparison is made between the magnetic liquid-encapsulated-Kyropoulos (MLEK) method and the magnetic liquid-encapsulated-Czochralski (MLEC) method for bulk growth of InP. The application of a magnetic field was observed to alter the interface shape and doping distribution in both LEK and LEC. For MLEC with the proper magnetic field strength, dopant striations can be reduced. In contrast, for MLEK with corotation, striations remained unchanged when a magnetic field was applied. However, for MLEK growth down with no rotation a uniform local dopant distribution with no growth striations is apparent. It is confirmed that MLEK growth in a low-gradient environment yields low-dislocation-density crystals.<>
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