Quartz crystal microbalance humidity sensor with porous electrodes

K. Galatsis, W. Qu, W. Wlodarski
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引用次数: 9

Abstract

This short paper describes a new idea for humidity measurement using QCM (Quartz Crystal Microbalance) devices. It is based on an etching approach which produces micropores into the electrodes of a QCM, instead of the common approach of coating the electrodes with hygroscopic materials. The electrodes are etched wet-chemically using buffered king water (NHO/sub 3/:HCl=1:3). The electrode surface becomes rough, resulting in a large surface area for water adsorption. Photolithographic etching using a plasma will be the next research stage, this will eliminate the generation of a randomly dented surface, hence providing a uniform porous structure. Fabrication and results of preliminary measurement are described in this paper.
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多孔电极石英晶体微天平湿度传感器
本文介绍了一种利用石英晶体微天平(QCM)测量湿度的新方法。它基于一种蚀刻方法,这种方法在QCM的电极上产生微孔,而不是用吸湿材料涂覆电极的常见方法。电极是湿化学蚀刻使用缓冲王水(NHO/sub 3/:HCl=1:3)。电极表面变得粗糙,导致吸附水的表面积很大。使用等离子体的光刻蚀刻将是下一个研究阶段,这将消除随机凹陷表面的产生,从而提供均匀的多孔结构。本文介绍了该装置的制作过程和初步测量结果。
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