C. Schlunder, R. Vollertsen, W. Gustin, H. Reisinger
{"title":"A reliable and accurate approach to assess NBTI behavior of state-of-the-art pMOSFETs with fast-WLR","authors":"C. Schlunder, R. Vollertsen, W. Gustin, H. Reisinger","doi":"10.1109/ESSDERC.2007.4430896","DOIUrl":null,"url":null,"abstract":"NBTI is a key challenge of today's technologies and could be assessed so far only by relative long stress durations. The On-the-fly characterization seems to be a proper method for fast-WLR, but shows also some problems. This work describes for the first time the application of OTF in combination with self-heating test structures and a method to correct the initial value without special equipment. Challenges and different solutions are introduced and discussed. We compare data from very fast non standard measurements with fWLR data acquired with regular test equipment. The insight we gained suggests that fWLR provides a suitable means for fast NBTI monitoring.","PeriodicalId":103959,"journal":{"name":"ESSDERC 2007 - 37th European Solid State Device Research Conference","volume":"111 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ESSDERC 2007 - 37th European Solid State Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.2007.4430896","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 10
Abstract
NBTI is a key challenge of today's technologies and could be assessed so far only by relative long stress durations. The On-the-fly characterization seems to be a proper method for fast-WLR, but shows also some problems. This work describes for the first time the application of OTF in combination with self-heating test structures and a method to correct the initial value without special equipment. Challenges and different solutions are introduced and discussed. We compare data from very fast non standard measurements with fWLR data acquired with regular test equipment. The insight we gained suggests that fWLR provides a suitable means for fast NBTI monitoring.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
