Silicon carbide power devices

J. Chante, M. Locatelli, D. Planson, L. Ottaviani, Erwan Morvan, K. Isoird, F. Nallet
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引用次数: 225

Abstract

The more and more demanding requirements of the power device users bring the silicon technology very close to its own physical limits. Silicon carbide (SiC) appears today as the only semiconductor having the capability for significantly improving the ratings of major power components (such as high voltage Schottky rectifiers), indeed for creating novel devices for new applications. The choice of SiC comes from superior physical properties, an existing substrate commercialization, and an experimental confirmation of several potentialities (at high voltage, temperature, or frequency) via demonstrative prototypes. However, such a young technology still suffers from a too poor quality of the available basic materials, and from the fabrication step immaturity, delaying the SiC power electronics emergence.
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碳化硅功率器件
功率器件用户越来越苛刻的要求使硅技术非常接近其物理极限。碳化硅(SiC)是目前唯一一种能够显著提高主要功率元件(如高压肖特基整流器)额定功率的半导体,确实可以为新应用创造新颖的器件。SiC的选择来自优越的物理性能,现有的衬底商业化,以及通过演示原型对几种潜力(在高压,温度或频率下)的实验确认。然而,这样一项年轻的技术仍然受到现有基础材料质量太差,以及从制造步骤上不成熟的困扰,延迟了SiC电力电子的出现。
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