Multipurpose thermal sensor based on Seebeck effect

2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) Pub Date : 2002-08-07 DOI:10.1109/MIEL.2002.1003189

D. Randjelović, G. Kaltsas, Ž. Lazić, M. Popovic

引用次数: 10

Abstract

This paper reports a multipurpose thermal sensor based on the Seebeck effect. The sensor has thermocouples with a multilayer structure consisting of one thermocouple strip laying on the insulating membrane and the other one under the first thermoelement and the membrane. The vertical arrangement allows a greater number of thermocouples to be placed on a given chip area. Central and lateral thermistors are placed near hot and cold thermocouple junctions, respectively, and serve for determination of the temperature difference established on the chip. Experimental results confirm that the same structure could be used as a thermal converter and a gas flow meter.

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基于塞贝克效应的多用途热传感器

本文报道了一种基于塞贝克效应的多用途热传感器。该传感器具有多层结构的热电偶，其中一个热电偶条位于绝缘膜上，另一个热电偶条位于第一热电元件和膜下。垂直排列允许在给定的芯片区域上放置更多数量的热电偶。中央和侧面热敏电阻分别放置在热热电偶和冷热电偶结附近，用于确定芯片上建立的温差。实验结果表明，同样的结构可以用作热转换器和气体流量计。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)

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