Enhanced controllability in MEMS metamaterial

Prakash Pitchappa, C. Ho, Y. Qian, Yu‐Sheng Lin, Navab Singh, Chengkuo Lee
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Abstract

In this report, we demonstrate a method to enhance the controllability of MEMS tunable metamaterial by isolating the electrical routing of alternate lines in the metamaterial unit cell array. The metamaterial consists of alternate lines of split ring resonators with two released heights. This allows for two independent tuning characteristics for a single MEMS metamaterial by selecting between the two external control ports. This technology can be further improved to provide line or pixel wise control, and can even be programmed to have one of many functionalities such as tunable filter, multicolor spatial modulator, gradient metamaterial or random metamaterial.
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增强MEMS超材料的可控性
在本报告中,我们展示了一种通过隔离超材料单元阵列中备用线路的电路由来增强MEMS可调谐超材料可控性的方法。该超材料由具有两个释放高度的分裂环谐振器的交替线组成。通过在两个外部控制端口之间进行选择,这允许单个MEMS超材料的两个独立调谐特性。该技术可以进一步改进,以提供线或像素控制,甚至可以编程为具有许多功能之一,如可调滤波器,多色空间调制器,梯度超材料或随机超材料。
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