Characterization of Thin Oxide using FIB-SIMS and FIB-TEM Techniques

O. Ngan, D. Mcphail, R. Chater, B. Shollock
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引用次数: 3

Abstract

The use of SIMS for the characterization and study of biomaterial surfaces is fast gaining popularity in the development of bio-functional and bioactive tissue compatible interfaces. The presence of TiO2oxide in metallic Ti implants and its ability to promote bioactivity is still unclear. FIB-SIMS (Focused Ion Beam-Secondary Ion Mass Spectrometry) and FIB-TEM (FIB-Transmission Electron Microscopy) techniques represent powerful tools for characterizing the oxide layer. This paper investigates the oxygen transport mechanism of thermal barrier coating systems applied on nickel-base superalloy turbine blades. In this study, a two-stage oxidation experiment is used.18O2is used as a tracer during the second stage oxidation on previously oxidized Ni-base superalloys with a layer of bond coat material. The aluminium oxide grown in16O2during the first stage oxidation serves as a background oxide. Mass spectra collected by FIB-SIMS reveal the counter mass transportation by inward diffusion of oxygen and outward diffusion of aluminium. New oxide formation during the second stage oxidation under an18O2enriched environment is observed at both the gas/oxide interface as well as oxide/superalloy interface. Transmission Electron Microscopy (TEM) can be used to identify the very fine phases developed in both the inter-diffusion zone as well as the thermally grown oxide layer. The use of Focused Ion Beam (FIB) technique allows for selective nano-machining of areas of interest for the production of TEM samples. FIB-SIMS and TEM are carried out to determine the specific phase transformations occurring in the TBC system.
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利用FIB-SIMS和FIB-TEM技术表征薄氧化物
在生物功能和生物活性组织兼容界面的开发中,利用SIMS对生物材料表面的表征和研究正迅速得到普及。金属钛植入物中tio2的存在及其促进生物活性的能力尚不清楚。FIB-SIMS(聚焦离子束-二次离子质谱)和FIB-TEM (fib -透射电子显微镜)技术是表征氧化层的有力工具。研究了镍基高温合金涡轮叶片热障涂层体系的氧输运机理。本研究采用两阶段氧化实验。18o2作为示踪剂,在镍基高温合金氧化后的第二阶段氧化中使用一层粘结涂层材料。在第一阶段氧化过程中,在1602中生长的氧化铝作为背景氧化物。FIB-SIMS收集的质谱揭示了氧向内扩散和铝向外扩散的反质输运。在富18o2的氧化环境下,在气体/氧化物界面和氧化物/高温合金界面均观察到第二阶段氧化形成新的氧化物。透射电镜(TEM)可以用来识别在扩散间区和热生长的氧化层中发育的非常细的相。聚焦离子束(FIB)技术的使用允许对感兴趣的区域进行选择性纳米加工,以生产TEM样品。进行FIB-SIMS和TEM来确定TBC系统中发生的特定相变。
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