{"title":"Evaluation of gate oxide reliability using luminescence method","authors":"Y. Uraoka, H. Yoshikawa, N. Tsutsu, S. Akiyama","doi":"10.1109/ICMTS.1990.161715","DOIUrl":null,"url":null,"abstract":"This system permits measurements of the initial breakdown characteristics, determination of the stress condition, and failure analysis consistently based on the evaluation theory. The failure modes both in initial characteristics and the time-dependent dielectric breakdown (TDDB) characteristics are experimentally found to correspond to each other. The intrinsic breakdown is considered to be caused by the concentration of the current in the edge region. The LOCOS structure plays an important role in the lifetime of the gate oxide.<<ETX>>","PeriodicalId":417292,"journal":{"name":"Proceedings of the 1991 International Conference on Microelectronic Test Structures","volume":"168 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 1991 International Conference on Microelectronic Test Structures","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.1990.161715","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 16
Abstract
This system permits measurements of the initial breakdown characteristics, determination of the stress condition, and failure analysis consistently based on the evaluation theory. The failure modes both in initial characteristics and the time-dependent dielectric breakdown (TDDB) characteristics are experimentally found to correspond to each other. The intrinsic breakdown is considered to be caused by the concentration of the current in the edge region. The LOCOS structure plays an important role in the lifetime of the gate oxide.<>
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