{"title":"Simple technique for the measurement of thermal time constants of microbolometer structures","authors":"P. Lambkin, N. Folan, B. Lane","doi":"10.1109/ICMTS.1999.766239","DOIUrl":null,"url":null,"abstract":"A straightforward electrical technique for determining the thermal time constant of microbolometer structures is presented. An impedance measurement of a microbolometer using an LCR meter shows that the phase lag/lead reaches a maximum as a function of frequency. It is shown that the frequency of maximum phase difference is simply related to the thermal time constant.","PeriodicalId":273071,"journal":{"name":"ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.1999.766239","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
A straightforward electrical technique for determining the thermal time constant of microbolometer structures is presented. An impedance measurement of a microbolometer using an LCR meter shows that the phase lag/lead reaches a maximum as a function of frequency. It is shown that the frequency of maximum phase difference is simply related to the thermal time constant.
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