{"title":"Extension of CD-TEM towards EDS Tomography","authors":"F. Baumann, Brian Popielarski, Yinggang Lu","doi":"10.1109/ASMC.2019.8791804","DOIUrl":null,"url":null,"abstract":"We show how a CD-TEM (Critical Dimension- Transmission Electron Microscope) can be used to acquire EDS (Energy Dispersive X-ray Spectroscopy) tomograms, which allow chemical mapping in 3D for most elements in the sample. This is achieved by developing a recipe using ordinary commands also used in CD-TEM programming.","PeriodicalId":287541,"journal":{"name":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2019.8791804","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We show how a CD-TEM (Critical Dimension- Transmission Electron Microscope) can be used to acquire EDS (Energy Dispersive X-ray Spectroscopy) tomograms, which allow chemical mapping in 3D for most elements in the sample. This is achieved by developing a recipe using ordinary commands also used in CD-TEM programming.
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