Analysis of junction leakage in advanced germanium P+/n junctions

G. Eneman, O. Sicart i Casain, E. Simoen, D. Brunco, B. de Jaeger, A. Satta, G. Nicholas, C. Claeys, M. Meuris, M. Heyns
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引用次数: 11

Abstract

We analysed heavily doped p+/n junctions in germanium, and found that the halos in this work provide a tradeoff between transistor channel control and junction leakage. Temperature-dependent leakage measurements show that either trap-assisted tunneling (TAT) or band-to-band-tunneling (BTBT) are the dominant leakage mechanisms for junctions with halos, (junction doping above ~ 1018 cm-3). Further, perimeter leakage data at/near room temperature for these junctions are consistent with the Hurckx model for TAT. At lower doping levels (no Halo), leakages are significantly lower and correspond to a shockley-read-hall (SRH) mechanism at/near room temperature and a standard diffusion current mechanism for temperatures above ~ 75degC.
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先进锗P+/n结漏分析
我们分析了锗中大量掺杂的p+/n结,发现这项工作中的光晕提供了晶体管通道控制和结漏之间的权衡。温度相关的泄漏测量表明,阱辅助隧穿(TAT)或带对带隧穿(tbbt)是具有晕结的主要泄漏机制(结掺杂大于~ 1018 cm-3)。此外,这些结在室温或接近室温时的周长泄漏数据与TAT的Hurckx模型一致。在较低的掺杂水平(无Halo)下,泄漏明显更低,在室温/近室温下对应于shockley-read-hall (SRH)机制,在~ 75℃以上温度下对应于标准扩散电流机制。
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