K. Yoo, D. Lee, R. Tiberio, J. Conway, H. Wong, Y. Nishi
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引用次数: 3
Abstract
This paper reports the design optimization of lateral nanoelectromechanical (NEM) relays for sub 1V actuation by COMSOL simulation with various materials and structures. Measured actuation voltages from fabricated relays showed good matching with simulation.
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