{"title":"An 8 mm/sup 3/ digitally steered laser beam transmitter","authors":"M. Last","doi":"10.1109/OMEMS.2000.879630","DOIUrl":null,"url":null,"abstract":"Summary form only given. A laser transmitter for free-space laser communications has been built and tested. This system consists of an edge-emitting diode laser, a ball lens, and a micromachined mirror actuated using two 4-bit mechanical digital-to-analog converters. The mirror and actuators are fabricated in Crones Microsystem's MUMPS process. The ball lens is assembled using a set of micro-tweezers from MEMS Precision Instruments controlled with a Sutter Instruments MP285 robotic xyz positioner. The laser diode was donated by SDL inc. and emits red (650nm) light. This work includes the demonstration of the first two degree-of-freedom micromirror actuated with mechanical digital to analog converters and its use in a system consisting of a laser diode, ball lens and micromirror.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879630","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Summary form only given. A laser transmitter for free-space laser communications has been built and tested. This system consists of an edge-emitting diode laser, a ball lens, and a micromachined mirror actuated using two 4-bit mechanical digital-to-analog converters. The mirror and actuators are fabricated in Crones Microsystem's MUMPS process. The ball lens is assembled using a set of micro-tweezers from MEMS Precision Instruments controlled with a Sutter Instruments MP285 robotic xyz positioner. The laser diode was donated by SDL inc. and emits red (650nm) light. This work includes the demonstration of the first two degree-of-freedom micromirror actuated with mechanical digital to analog converters and its use in a system consisting of a laser diode, ball lens and micromirror.
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