{"title":"Physics of electron transport in nitride-based material","authors":"M. Shur","doi":"10.1109/COMMAD.2002.1237177","DOIUrl":null,"url":null,"abstract":"In AlN/InN/GaN-based semiconductors, the polar optical phonon energy is large (much larger than the thermal energy at room temperature). As a consequence, the dominant optical polar scattering occurs in two steps: photon absorption and re-emission (resulting in an effectively elastic scattering process). In high electric fields, an electron runaway plays a key role in determining the peak field and peak velocity in these compounds. The runaway effects are further enhanced in the two dimensional electron gas at the AlGaN/GaN or AlGaInN-InGaN heterointerfaces. As a result of the runaway and quantization effects, the peak electron drift velocity and peak electric field of the 2D electrons in compound semiconductors are smaller than for the 3D electrons in these materials. In very short (e.g. sub-0.1 micron) GaN-based structures, ballistic and overshoot effects become important. In a deep submicron structures, the ballistic effects in low electric fields reduce an apparent value of the low field mobility because of a finite electron acceleration time in the structure. In long channel devices, the electron mobility in AlGaN/GaN or AIGalnN/InGaN heterostructures at cryogenic temperatures is limited by acoustic scattering, electron transfer from 2D to 3D states, and by the alloy scattering. Relatively high values of the electron mobility and very high values of the 2D electron gas densities in nitride heterostructures also make them attractive candidates for plasma wave electronics devices operating in the terahertz range of frequencies.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2002.1237177","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

Abstract

In AlN/InN/GaN-based semiconductors, the polar optical phonon energy is large (much larger than the thermal energy at room temperature). As a consequence, the dominant optical polar scattering occurs in two steps: photon absorption and re-emission (resulting in an effectively elastic scattering process). In high electric fields, an electron runaway plays a key role in determining the peak field and peak velocity in these compounds. The runaway effects are further enhanced in the two dimensional electron gas at the AlGaN/GaN or AlGaInN-InGaN heterointerfaces. As a result of the runaway and quantization effects, the peak electron drift velocity and peak electric field of the 2D electrons in compound semiconductors are smaller than for the 3D electrons in these materials. In very short (e.g. sub-0.1 micron) GaN-based structures, ballistic and overshoot effects become important. In a deep submicron structures, the ballistic effects in low electric fields reduce an apparent value of the low field mobility because of a finite electron acceleration time in the structure. In long channel devices, the electron mobility in AlGaN/GaN or AIGalnN/InGaN heterostructures at cryogenic temperatures is limited by acoustic scattering, electron transfer from 2D to 3D states, and by the alloy scattering. Relatively high values of the electron mobility and very high values of the 2D electron gas densities in nitride heterostructures also make them attractive candidates for plasma wave electronics devices operating in the terahertz range of frequencies.
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氮基材料中电子传递的物理学
在基于AlN/InN/ gan的半导体中,极性光声子能量很大(远远大于室温下的热能)。因此,主要的光学极性散射发生在两个步骤:光子吸收和再发射(导致有效的弹性散射过程)。在高电场条件下,电子失控在确定这些化合物的峰场和峰速度方面起着关键作用。在AlGaN/GaN或AlGaInN-InGaN异质界面处的二维电子气中,失控效应进一步增强。由于失控效应和量子化效应,复合半导体中二维电子的峰值电子漂移速度和峰值电场都小于三维电子。在非常短的(例如低于0.1微米)gan基结构中,弹道和超调效应变得很重要。在深亚微米结构中,由于结构中的电子加速时间有限,低电场中的弹道效应降低了低场迁移率的表观值。在长通道器件中,低温下AlGaN/GaN或AIGalnN/InGaN异质结构中的电子迁移受到声散射、电子从二维到三维态转移和合金散射的限制。氮化物异质结构中相对高的电子迁移率值和非常高的二维电子气体密度值也使它们成为在太赫兹频率范围内工作的等离子体波电子器件的有吸引力的候选者。
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