K. Takano, M. Goto, E. Shiling, A. Gasasira, J. Liao
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引用次数: 2
Abstract
Direct Charge Measurement (DCM) has a capability to improve the capacitance measurement time in parametric test. Through an actual wafer measurement, we have successfully verified that DCM can measure MOS capacitor much faster than an LCR meter while keeping good correlations for wafer manufacturing.
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