Silicon microring resonator connected with submicorn comb actuator

K. Takahashi, Y. Kanamori, K. Hane
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引用次数: 1

Abstract

A 500 nm wide 260 nm thick 63.4 mum long silicon microring waveguide was suspended in air by connecting to a comb actuator with the low-loss suspension arms. The airgap between the microring and the input/output waveguides was adjusted by a voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input to the drop waveguides was varied from 0% at the gap of 750 nm to 50% maximum value (about 30 dB) at the voltages from 0 V to 28 V. Under the drop condition, the bandwidth of the drop signal was 0.5 nm, corresponding to the Q-value of 3100.
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硅微环谐振器与亚微米梳状驱动器连接
将一个500 nm宽、260 nm厚、63.4 nm长的硅微环波导与带有低损耗悬臂的梳状致动器相连,悬浮在空气中。微环和输入/输出波导之间的气隙通过施加在梳状执行器上的电压来调节,从而改变耦合效率。在电压为0 ~ 28 V时,从输入到跌落波导的透射率从750 nm处的0%变化到最大透射率的50%(约30 dB)。在下降条件下,下降信号的带宽为0.5 nm,对应的q值为3100。
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