A Planning Approach for an Effective Digitalization of Processes in Mature Semiconductor Production Facilities

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Pub Date : 2019-05-01 DOI:10.1109/ASMC.2019.8791830

S. Keil, F. Lindner, G. Schneider, Tobias Jakubowitz

引用次数: 5

Abstract

Automation and digitalization are important measures for semiconductor manufacturers to enhance key performance indicators, and to strengthen their competitiveness. However, concrete approaches for effectively planning this digitalization of production or production-support processes are missing. Therefore, this paper introduces the Planning for Digitalization (P4D) approach. P4D aggregates general planning approaches for digitalization in production, as well as concrete tools and methods. By evaluating and categorizing their use in different situations of digitalization processes, P4D allows a situation-specific and new combination of these approaches and methods. Its goal is a comprehensive and action guiding compendium that can easily be applied. In this paper, part of P4D is exemplarily evaluated at a production site of Infineon Technologies in Dresden, Germany.

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成熟半导体生产设施中有效数字化过程的规划方法

自动化和数字化是半导体制造企业提升关键绩效指标、增强竞争力的重要举措。然而，目前还缺乏有效规划生产或生产支持过程数字化的具体方法。因此，本文介绍了数字化规划(Planning for Digitalization, P4D)方法。P4D集合了数字化生产的总体规划方法，以及具体的工具和方法。通过评估和分类它们在数字化过程的不同情况下的使用，P4D允许这些方法和方法的具体情况和新的组合。它的目标是一个全面和行动指导纲要，可以很容易地应用。本文在德国德累斯顿英飞凌技术的一个生产基地对部分P4D进行了实例评估。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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