Zero-Power Latching, Large-Stroke, High-Precision Linear Microactuator for Lightweight Structures in Space

19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI:10.1109/MEMSYS.2006.1627902

R. Toda, E. Yang

引用次数: 6

Abstract

This paper presents the successful demonstration of a latching-type, large-stroke, high-precision linear microactuator. The microactuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of PZT actuator for slider thrust and electrostatic comb drive for slider grip. Incremental step size is precisely adjustable to tens of nanometer level by controlling PZT actuator voltage. Large stroke is obtained by repeating the operation sequence numerous times. Large stroke exceeding 600μm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.

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用于空间轻量化结构的零功率闭锁、大行程、高精度线性微驱动器

本文介绍了一种锁存式、大行程、高精度线性微动器的成功演示。微致动器能够零功率闭锁，或通过使用预应力弹簧负载强制保持其位置。该驱动器由用于滑块推力的PZT驱动器和用于滑块抓地力的静电梳子驱动器组合驱动。通过控制压电陶瓷致动器电压，可以精确地将增量步长调节到几十纳米级。大行程是通过多次重复操作顺序得到的。已证实有超过600μm的大行程。除了滑块的长度和外部负载外，没有可以想象的行程限制。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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19th IEEE International Conference on Micro Electro Mechanical Systems

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