Piezoresistive Cantilever for Nano-Newton Sensing in Two Dimensions

19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI:10.1109/MEMSYS.2006.1627867

T. C. Duc, J. Creemer, P. Sarro

引用次数: 6

Abstract

This paper describes a novel two dimensional piezoresistive cantilever force sensor that is used to evaluate the impact force between micro-handling tools and microparticles in the nano-Newton range. Piezoresistor sensors are made from 500 nm-thick p-doped epitaxial silicon on a single crystal silicon substrate. The silicon cantilever is fabricated using bulk micromachining. Switching from the lateral mode to the vertical mode to monitor the lateral and vertical applied force is easily done by using two electronic switches. Force sensitivity of the implemented sensors up to 135 and 310 V/N for lateral and vertical configurations, respectively, is measured. The force resolution is estimated at 5 nN.

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二维纳米牛顿传感的压阻悬臂梁

本文介绍了一种新型的二维压阻悬臂力传感器，用于测量微加工工具与微颗粒之间在纳米牛顿范围内的冲击力。压阻传感器是在单晶硅衬底上由500纳米厚的p掺杂外延硅制成的。采用体微加工技术制备了硅悬臂梁。通过使用两个电子开关，可以很容易地从横向模式切换到垂直模式，以监测横向和垂直施加的力。对于横向和垂直配置，所实现的传感器的力灵敏度分别为135和310 V/N。力分辨率估计为5 nN。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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19th IEEE International Conference on Micro Electro Mechanical Systems

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