Plasmonic 1×200 array scanner based on 65-nm CMOS asymmetric FETs for real-time terahertz

M. Ryu, Sang Hyo Ahn, Jong‐Ryul Yang, Woo-Jae Lee, Seong‐Tae Han, Kyung Rok Kim
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引用次数: 2

Abstract

Terahertz (THz) imaging technology has a great potential application owing to the unique properties of THz wave that has both permeability and feature of straight [1]. Especially for real-time THz imaging detectors, field-effect transistor (FET)-based plasmonic THz detectors [2] are now being intensively developed in multi-pixel array configuration by exploiting the silicon (Si) CMOS technology advantages of low-cost and high integration density. In terms of the circuit design approach, by utilizing resistive self-mixing in the FET channel, a 0.65 THz focal plane array (FPA) detector was reported [3] and more recently, a 1 k-pixel camera has been demonstrated for a real-time THz imaging by 65-nm CMOS technology [4]. In this work, we experimentally demonstrate the real-time terahertz (THz) imaging of moving object on the conveyer belt by implementing asymmetric FET-based plasmonic 2×200 array scanner in 65-nm CMOS technology. Based on the enhanced detecting performance from our previous works [5][6], fast and uniform detection results are presented by novel device and circuit design for real-time THz imaging.
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基于65纳米CMOS非对称场效应管的实时太赫兹等离子体1×200阵列扫描仪
太赫兹(THz)成像技术由于其既具有渗透性又具有直直性的独特特性而具有很大的应用潜力[1]。特别是对于实时太赫兹成像探测器,基于场效应晶体管(FET)的等离子体太赫兹探测器[2]正在利用硅(Si) CMOS技术低成本和高集成密度的优势,在多像素阵列配置中得到大量开发。在电路设计方法方面,通过利用FET通道中的电阻自混合,报道了0.65太赫兹焦平面阵列(FPA)探测器[3],最近,一个1 k像素的相机已经被证明可以通过65纳米CMOS技术进行实时太赫兹成像[4]。在这项工作中,我们在65纳米CMOS技术中实现了基于非对称场效应晶体管的等离子体2×200阵列扫描仪,实验证明了传送带上运动物体的实时太赫兹(THz)成像。在前人研究成果[5][6]的基础上,通过对实时太赫兹成像的新型器件和电路设计,实现了快速均匀的检测结果。
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