A. Both, W. Bacher, M. Heckele, K. Muller, R. Ruprecht, M. Strohrmann
{"title":"Molding process with high alignment precision for the LIGA technology","authors":"A. Both, W. Bacher, M. Heckele, K. Muller, R. Ruprecht, M. Strohrmann","doi":"10.1109/MEMSYS.1995.472582","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1995.472582","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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