{"title":"Suspended Membrane Single Crystal Silicon Micro Hotplate for Differential Scanning Calorimetry","authors":"J. Lee, C. Spadaccini, E. Mukerjee, W. King","doi":"10.1109/MEMSYS.2009.4805517","DOIUrl":null,"url":null,"abstract":"This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside release were found to be optimal designs. Due to the requirements of routine sample loading, the size of the heater is 100 or 200 ¿m while the size of the backside membrane cavity is 400 ¿m. Our design achieves a combination of time constant, temperature sensitivity, and heating efficiency that are comparable or superior to previously reported microcalorimeters.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"316 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2009.4805517","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
Abstract
This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside release were found to be optimal designs. Due to the requirements of routine sample loading, the size of the heater is 100 or 200 ¿m while the size of the backside membrane cavity is 400 ¿m. Our design achieves a combination of time constant, temperature sensitivity, and heating efficiency that are comparable or superior to previously reported microcalorimeters.
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