S. Krishnan, E. M. Sankara Narayanan, Y.Z. Xu, F. Clough, M. M. De Souza, D. Flores, M. Vellvehí, J. Millán
{"title":"Novel dual gate high voltage TFT with variable doping slot","authors":"S. Krishnan, E. M. Sankara Narayanan, Y.Z. Xu, F. Clough, M. M. De Souza, D. Flores, M. Vellvehí, J. Millán","doi":"10.1109/MIEL.2002.1003163","DOIUrl":null,"url":null,"abstract":"A novel high performance dual gated, glass compatible polycrystalline silicon HVTFT with blocking voltage in excess of 300 V is demonstrated. This device shows an order of magnitude improvement in the on-state performance in comparison to its offset drain (DG-OD) counterpart. The significantly enhanced performance of this dual gate device is due to an offset region doped through slots of reducing dimensions from the source (control gate) to the drain (sub-gate).","PeriodicalId":221518,"journal":{"name":"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIEL.2002.1003163","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
A novel high performance dual gated, glass compatible polycrystalline silicon HVTFT with blocking voltage in excess of 300 V is demonstrated. This device shows an order of magnitude improvement in the on-state performance in comparison to its offset drain (DG-OD) counterpart. The significantly enhanced performance of this dual gate device is due to an offset region doped through slots of reducing dimensions from the source (control gate) to the drain (sub-gate).
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