Dynamic Analysis for a MEMS/NEMS Based Device

Abstract

MEMS/NEMS are used to create micro-miniature mechanical devices primarily from silicon. MEMS/NEMS technology is used to build accelerometers in automobile airbags, pressure sensors, flow rate sensors etc. In microelectromechanical systems, the feature sizes are larger, less complex, and design rules are more relaxed compared to most Integrated Circuit (IC) fabrication technology. The comparison to the IC industry since most of the processes for MEMS/NEMS devices have been derived from IC technology. At this point, we think the line between MEMS and NEMS devices and systems is slightly unclear hence a generalized analysis.