Relationship among Current Fluctuations during Forming, Cell-To-Cell Variability and Reliability in RRAM Arrays

A. Grossi, C. Zambelli, P. Olivo, E. Miranda, V. Stikanov, T. Schroeder, C. Walczyk, C. Wenger
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引用次数: 22

Abstract

In this work, cells behavior during forming is monitored through an incremental pulse and verify algorithm on 4kbit RRAM arrays. This technique allows recognising different cell behaviors in terms of read-verify current oscillation: the impact of these oscillations on reliability and cell-to-cell variability has been investigated during 1k endurance cycles and 100k pulse stress under a variety of cycling conditions. Conductance histograms for the post-forming current reveal the nanosized nature of the filamentary paths across the dielectric film.
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RRAM阵列形成过程中电流波动、单元间变异性和可靠性的关系
在这项工作中,通过在4kbit RRAM阵列上的增量脉冲和验证算法来监测细胞在形成过程中的行为。该技术允许在读取验证电流振荡方面识别不同的细胞行为:在各种循环条件下,在1k耐力循环和100k脉冲应力下,研究了这些振荡对可靠性和细胞间变异性的影响。后形成电流的电导直方图揭示了穿过介电膜的丝状路径的纳米级性质。
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