S. Capraro, C. Bermond, T. Vo, J. Piquet, B. Fléchet, M. Thomas, A. Farcy, J. Torres, S. Crémer, E. Guichard, A. Haen
{"title":"Design improvement of RF 3D MIM damascene capacitor","authors":"S. Capraro, C. Bermond, T. Vo, J. Piquet, B. Fléchet, M. Thomas, A. Farcy, J. Torres, S. Crémer, E. Guichard, A. Haen","doi":"10.1109/ESSDERC.2007.4430961","DOIUrl":null,"url":null,"abstract":"High frequency characterizations and simulations of 3D damascene metal-insulator-metal (MIM) capacitors are presented. We focused on the impact of the design on the performance of integrated capacitors. Results showed that properties of MIM capacitor get improved with specific design recommendations on electrodes shape.","PeriodicalId":103959,"journal":{"name":"ESSDERC 2007 - 37th European Solid State Device Research Conference","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ESSDERC 2007 - 37th European Solid State Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.2007.4430961","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
High frequency characterizations and simulations of 3D damascene metal-insulator-metal (MIM) capacitors are presented. We focused on the impact of the design on the performance of integrated capacitors. Results showed that properties of MIM capacitor get improved with specific design recommendations on electrodes shape.
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