A study on current handling capability of dual gate MOS thyristor (DGMOS)

M. Otsuki, M. Kirisawa, K. Sakurai
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引用次数: 2

Abstract

This paper describes the experimental results of new Dual Gate MOS Thyristor (DGMOS), which can be fabricated with the same process technology as IGBT. In order to investigate the mechanism of turn-off failure in a large chip, which occurs lower current density compared with smaller chip, 9.0/spl times/7.2 mm 600 V-DGMOS with internal gate interconnection have been evaluated. The inhomogenious current distribution is the major reason of turn-off failure. In order to realize higher current handling capability, the formation of lower resistance gate interconnection is one of the key technologies as well as developing the new cell structure which has higher latch-up immunity.
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双栅MOS晶闸管(DGMOS)电流处理能力研究
本文介绍了新型双栅MOS晶闸管(DGMOS)的实验结果,该晶闸管可采用与IGBT相同的工艺制造。为了研究大芯片电流密度比小芯片低的关断失效机理,对9.0/spl次/7.2 mm内栅极互连的600 V-DGMOS进行了研究。电流分布不均匀是导致关断失效的主要原因。为了实现更高的电流处理能力,形成低阻栅极互连以及开发具有更高锁存抗扰度的新型电池结构是关键技术之一。
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