J. Wehner, M. Martyniuk, J. Antoszewski, C. Musca, J. Dell, L. Faraone
{"title":"Optical and membrane modelling in a MEMS hyperspectral imaging system","authors":"J. Wehner, M. Martyniuk, J. Antoszewski, C. Musca, J. Dell, L. Faraone","doi":"10.1109/COMMAD.2002.1237318","DOIUrl":null,"url":null,"abstract":"Hyperspectral imaging using micro-electro-mechanical systems (MEMS) is investigated. A Fabry-Perot cavity is created using a silicon nitride membrane suspended over a variable length air gap, to support a distributed Bragg reflector. Models of membrane behaviour and reflector optical performance are given.","PeriodicalId":129668,"journal":{"name":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2002.1237318","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Hyperspectral imaging using micro-electro-mechanical systems (MEMS) is investigated. A Fabry-Perot cavity is created using a silicon nitride membrane suspended over a variable length air gap, to support a distributed Bragg reflector. Models of membrane behaviour and reflector optical performance are given.
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