Fabricaton of Microspring Probes Using Conductive Paste Dispensing

19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI:10.1109/MEMSYS.2006.1627785

T. Itoh, K. Kataoka, T. Suga

引用次数: 4

Abstract

We have developed a new fabrication technique that realizes 3-dimensional microspring probes made of conductive pastes. In the technique, ultra precise dispensing of low-temperature silver pastes on a heated substrate is continuously repeated. 50-µ m-diameter microcantilevers with an approximately 200-µ m-high post have been successfully structured on a 353 K heated substrate and their mechanical and electrical properties have been investigated. The probing resistance of as-structured cantilevers with a low contact force of 1 mN could be effectively lowered to less than 1 Ω by heat cure process with the temperature of 523 K and by fritting process with the application of 5 V -150 mA.

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

利用导电膏体点胶制备微弹簧探针

我们开发了一种新的制造技术，实现了由导电浆料制成的三维微弹簧探针。在该技术中，在加热的基板上连续重复超精确地分配低温银膏。在353k加热的衬底上成功构建了直径为50微米、柱高约200微米的微悬臂梁，并对其机械和电气性能进行了研究。采用523 K的热固化工艺和5v ~ 150 mA的熔融工艺，可以有效地将接触力为1 mN的结构悬臂梁的探测电阻降低到1 Ω以下。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文去求助

来源期刊

19th IEEE International Conference on Micro Electro Mechanical Systems

自引率

0.00%

发文量

期刊最新文献

High Resolution and S/N Ratio Nano Probing System Development of Methanol Steam Reforming System Integrated with Catalytic Combustor Using Carbon Nanotubes as Catalyst Supports Density Control of Carbon Nanotubes Using Ethanol Vapor Flow Muscle Proteins as High Speed Nano Transporters on Micro Patterns Insertion Force Sensor by Sidewall-Doping with Rapid Thermal Diffusion