{"title":"Self-organized Si suboxide (SiOx, x<2) interfacial layers - optimization of performance and reliability in advanced devices","authors":"G. Lucovsky, J. C. Phillips","doi":"10.1109/IWGI.2003.159187","DOIUrl":null,"url":null,"abstract":"Self-organized Si suboxide (SiO/sub x/, x<2) interfacial layers were characterised by medium energy ion scattering, single wavelength ellipsometry, synchrotron X-ray photoelectron spectroscopy and optical second harmonic generation.","PeriodicalId":221442,"journal":{"name":"Extended Abstracts of International Workshop on Gate Insulator (IEEE Cat. No.03EX765)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Extended Abstracts of International Workshop on Gate Insulator (IEEE Cat. No.03EX765)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IWGI.2003.159187","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Self-organized Si suboxide (SiO/sub x/, x<2) interfacial layers were characterised by medium energy ion scattering, single wavelength ellipsometry, synchrotron X-ray photoelectron spectroscopy and optical second harmonic generation.
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