A. Arslan, Ç. Ataman, S. Holmstrom, K. Hedsten, H. Rahmi Seren, H. Urey, P. Enoksson
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引用次数: 10
Abstract
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications 9 mum resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
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