Evaluation of tribocharging and ESD protection schemes on GMR magnetic recording heads during CO2 jet cleaning

D. Vickers, D. Carradero
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Abstract

This paper presents the results of investigations into tribocharging and ESD effects of CO/sub 2/ snow jet cleaning on magnetic recording components for hard disk drives. The studies are performed at different levels of integration, including component parts, head gimbal assembly (HGA) and head stack assembly. The electrical stresses induced during the cleaning process are evaluated, followed by investigation of the effectiveness of traditional ESD protection schemes. CO/sub 2/ snow jet cleaning uses specially designed nozzles to expand liquid CO/sub 2/ into a two-phase flow. The jet stream consists of a high-density jet of solid, yet soft, CO/sub 2/ particles ('snow') immersed in a CO/sub 2/ gas. The tribocharging effect of the high velocity impact of the CO/sub 2/ particles on the surfaces of the slider, suspension, flex cable, and e-block components and assemblies is studied. This paper also includes results of process design variations, such as grounding and ionization to reduce the risk of ESD damage. A quasistatic tester was used to characterize the HGAs and HSA before and after cleaning.
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二氧化碳喷射清洗过程中GMR磁记录磁头摩擦充电和ESD保护方案的评价
本文研究了CO/sub - 2/雪射流清洗对硬盘磁记录元件摩擦充电和ESD的影响。这些研究是在不同的集成水平上进行的,包括组件部件、头部万向节组件(HGA)和头部堆栈组件。评估了清洗过程中产生的电应力,然后研究了传统ESD保护方案的有效性。CO/sub - 2/雪射流清洗使用特殊设计的喷嘴将液体CO/sub - 2/膨胀成两相流。急流由高密度的固体、柔软的CO/sub - 2颗粒(“雪”)组成,浸没在CO/sub - 2/气体中。研究了CO/sub - 2/颗粒在滑块、悬架、柔性电缆和e-block组件和组件表面的高速冲击所产生的摩擦增压效应。本文还包括工艺设计变化的结果,例如接地和电离,以减少ESD损坏的风险。采用准静态测试仪对清洗前后的HGAs和HSA进行了表征。
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