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Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000 (IEEE Cat. No.00TH8476)最新文献

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Device charging in shipping packages 运输包裹中的设备收费
B. Unger
Static charges can develop on devices with movement in shipping packages. During subsequent handling or testing operations, an ESD (electrostatic discharge) can result in device failure. Therefore, the materials used to package semiconductor devices should be selected for their ability to minimize charging and damaging ESDs. Some triboelectric charging test results are shown that suggest that some of these device packages contribute to the failure rate at the assembly facilities.
在运输包装中移动的设备会产生静电。在后续的操作或测试过程中,静电放电可能会导致设备故障。因此,用于封装半导体器件的材料应选择能够最大限度地减少充电和破坏性esd的材料。一些摩擦充电测试结果表明,其中一些器件封装导致了组装设施的故障率。
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引用次数: 1
Investigation on different ESD protection strategies devoted to 3.3 V RF applications (2 GHz) in a 0.18 /spl mu/m CMOS process 在0.18 /spl mu/m CMOS工艺下3.3 V RF应用(2 GHz)不同ESD保护策略的研究
C. Richier, Pascal Salome, G. Mabboux, I. Zaza, A. Juge, P. Mortini
ESD protection for RF applications must deal with good ESD performance, minimum capacitance, zero series resistance and good capacitance linearity. In order to fulfil these requirements, different ESD protection strategies for RF applications have been investigated in a 0.18 /spl mu/m CMOS process. This paper compares different ESD protection devices and shows that a suitable ESD performance target for RF applications (200 fF max, 2 kV HBM) can be reached with a diode network scheme. The optimization of the diodes is then a key point which is detailed. A trade-off must be found between the ESD performance, the voltage drop during ESD and the parasitic capacitance. Poly as well as STI bounded diodes have been studied and it appears clearly that a solution based on poly bounded diodes is the best choice.
射频应用中的ESD保护必须处理良好的ESD性能、最小的电容、零串联电阻和良好的电容线性。为了满足这些要求,在0.18 /spl mu/m CMOS工艺中研究了射频应用的不同ESD保护策略。本文比较了不同的ESD保护器件,表明采用二极管网络方案可以达到适合射频应用的ESD性能目标(最大200ff, 2kv HBM)。因此,二极管的优化是一个重点,这是详细的。必须在ESD性能、ESD期间的电压降和寄生电容之间找到一个权衡。对Poly和STI有界二极管进行了研究,显然基于Poly有界二极管的解决方案是最佳选择。
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引用次数: 135
A method for determining a transmission line pulse shape that produces equivalent results to human body model testing methods 一种用于确定产生与人体模型测试方法等效结果的传输线脉冲形状的方法
J.C. Lee, M. A. Hoque, G. Croft, J. Liou, W. R. Young, J. Bernier
Electrostatic discharge (ESD) is responsible for more than 25% of semiconductor device and chip damage each year. This paper focuses on an ESD event resulting from the charge being transferred from a human body to an integrated circuit (i.e. the human body model, HBM). In particular, the study provides simulation and experimental results to determine the main mechanism governing the failure of MOS devices subjected to the HBM stress. Based on this mechanism, the correct pulse needed to measure the HBM ESD characteristics using the transmission line pulse (TLP) technique is also determined and recommended.
静电放电(ESD)每年造成超过25%的半导体器件和芯片损坏。本文主要研究了电荷从人体转移到集成电路(即人体模型HBM)所引起的ESD事件。特别地,本研究提供了仿真和实验结果来确定在HBM应力作用下MOS器件失效的主要机制。基于这一机制,确定并推荐了使用传输线脉冲(TLP)技术测量HBM ESD特性所需的正确脉冲。
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引用次数: 17
A scalable analytical model for the ESD N-well resistor ESD n阱电阻的可扩展分析模型
Venugopal Puvvada, Venkatesh Srinivasan, Vishal Gupta
We have proposed a simple analytical model for the N-well resistor up to the turnover point in the I-V characteristic of the device. A simple and accurate method of extraction of the parameters used on which this model is based has also been proposed. Furthermore, the scalability of these parameters has also been studied. The model and its scalability have been verified with experimental data.
我们已经提出了一个简单的解析模型,n -阱电阻在器件的I-V特性的周转点。本文还提出了一种简单而准确的参数提取方法。此外,还研究了这些参数的可扩展性。实验数据验证了该模型及其可扩展性。
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引用次数: 6
Advancements in inherently dissipative polymer (IDP) alloys provide new levels of clean, consistent ESD protection 固有耗散聚合物(IDP)合金的进步提供了新的清洁水平,一致的ESD保护
K.J. Kim, M. Hardwick, H. Pham, T. Fahey
A new class of inherently dissipative polymer (IDP) alloys has been developed through recent advances in IDP formulation utilizing additional charge carriers in the polymerization of the IDP. This new generation of IDP technology delivers static decay times of less than 0.1 s and surface resistance values of 10/sup 7/ /spl Omega/ which are two orders of magnitude better than previously available generations of IDPs. This IDP technology has enabled the development of a new class of IDP alloys with host polymers such as PETG, polypropylene and polyurethane. These IDP alloys reach previously unattainable surface and volume resistance levels of 10/sup 8/ /spl Omega/. These resistance values hold permanently and consistently through injection molding or extrusion due to a flat loading curve, differing from the steep loading curves in this resistance range seen in conductive filler systems. Additional optimization of the IDP alloys has led to improvements in cleanliness. Packaging and components therefore exhibit consistent, permanent surface resistance values between 10/sup 8/ and 10/sup 9/ /spl Omega/ without introducing contaminants into the cleanroom. The new class of IDP alloys provides new levels of clean, consistent ESD protection via a unique blend of electrical, physical, and cleanliness properties of the optimized alloy.
近年来,在固有耗散聚合物(IDP)的聚合过程中,利用附加的载流子,在IDP配方方面取得了新的进展,从而开发出了一类新的固有耗散聚合物(IDP)合金。新一代IDP技术的静态衰减时间小于0.1 s,表面电阻值为10/sup / 7/ spl ω /,比以前可用的IDP技术提高了两个数量级。这种IDP技术能够开发出一种新型的IDP合金,其主体聚合物为PETG、聚丙烯和聚氨酯。这些IDP合金达到了以前无法达到的10/sup / 8/ spl ω /的表面和体积阻力水平。由于加载曲线平坦,这些电阻值在注塑成型或挤出过程中保持永久和一致,不同于导电填料系统中在该电阻范围内看到的陡峭加载曲线。对IDP合金的进一步优化导致了清洁度的提高。因此,包装和组件具有一致的,永久的表面电阻值在10/sup 8/和10/sup 9/ /spl Omega/之间,而不会将污染物引入洁净室。新型IDP合金通过优化合金独特的电气、物理和清洁度特性,提供了更高水平的清洁、一致的ESD保护。
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引用次数: 0
Influence of the charging effect on HBM ESD device testing 充电效应对HBM ESD器件测试的影响
T. Brodbeck
The standards for testing the ESD sensitivity of electronic components according to the HBM (MIL, JEDEC, ESDA) require a specific switch in the HBM ESD waveform generator to ensure that the socket and the DUT is not left in a charged state after the stress. The absence of this switch may result in the wrong ESD threshold levels. For two different waveform generators, the charging effect was measured by using an electrostatic voltmeter. An unexpected experimental result, showing that the HBM ESD threshold voltage strongly depends on the number of stress pulses, could be explained by the measured charging of these components. Consequences for other types of components and corrective actions are discussed.
根据HBM测试电子元件ESD灵敏度的标准(MIL, JEDEC, ESDA)要求在HBM ESD波形发生器中使用特定的开关,以确保插座和被测件在受力后不会处于充电状态。没有此开关可能导致错误的ESD阈值水平。对于两种不同的波形发生器,采用静电电压表测量了充电效应。一个意想不到的实验结果表明,HBM ESD阈值电压强烈依赖于应力脉冲的数量,这可以通过测量这些组件的充电来解释。讨论了其他类型部件和纠正措施的后果。
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引用次数: 2
VerifyESD: a tool for efficient circuit level ESD simulations of mixed-signal ICs VerifyESD:一个有效的电路级ESD混合信号ic仿真工具
M. Baird, R. Ida
For many classes of technologies and circuits, it is beneficial to perform circuit simulations for ESD design, verification, and performance prediction. This is particularly true for mixed-signal ICs, where complex interaction between I/Os and multiple power supplies make manual analysis difficult and error prone. Unfortunately, high node and component counts typically prohibit simulations of an entire circuit. Thus, a manual intervention by the designer is usually required to minimize the circuit size. This paper introduces a new tool which automatically reduces the number of voltage nodes per ESD simulation by including only those devices that are necessary. In addition, a simple method for modeling ESD device failure while maintaining compatibility with existing CAD tools and libraries is discussed.
对于许多类型的技术和电路,进行电路仿真有利于ESD设计、验证和性能预测。对于混合信号ic尤其如此,其中I/ o和多个电源之间的复杂交互使得手动分析变得困难且容易出错。不幸的是,高节点和组件计数通常禁止模拟整个电路。因此,通常需要设计者的人工干预来最小化电路尺寸。本文介绍了一种新工具,该工具通过只包含必要的器件来自动减少每个ESD仿真的电压节点数量。此外,还讨论了一种简单的方法来建模ESD器件故障,同时保持与现有CAD工具和库的兼容性。
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引用次数: 33
A study of the mechanisms for ESD damage to reticles 静电放电损伤网眼的机理研究
J. Montoya, L. Levit, A. Englisch
Reticles were exposed to the fringing field from an electrode biased to a high voltage. The reticles in the study included special reticles intended to benchmark the ESD hazard of a photobay and production reticles of a variety of feature sizes. It was found that without any electrical contact between the reticle and the electrode, reticle damage could be done. A wide bandwidth transient-EMI sensing antenna revealed that the reticle sparked when a voltage as low as 2000 V was applied to the electrode. The tests showed that the ESD threshold of reticles with smaller feature sizes was lower than for reticles with larger feature sizes. Reticles were scanned under a microscope for reticle damage. It was found that when the voltage was ramped to 17 kV and returned to zero, damage to the reticle was observed. When a voltage of 7.5 kV was applied once, no damage was observed but when it was applied 100 times, reticle damage was observed. This study confirms that ESD damage is done to a reticle by charged objects in the vicinity of the reticle in contrast with the prevailing belief that reticle damage is done only by charged reticles. The study also showed that reticles can be sufficiently damaged to cause printing errors due to the accumulated damage caused by repeated low level exposure to the fringing field of a charged object in the vicinity of the reticle.
从偏置到高电压的电极中,光圈暴露在边缘场中。研究中使用的光柱包括用于测试光电舱ESD危害的特殊光柱和各种特征尺寸的生产光柱。研究发现,在不与电极接触的情况下,会对电极造成损伤。宽带宽瞬态电磁干扰感应天线显示,当低至2000 V的电压施加到电极上时,十字线触发。实验表明,特征尺寸较小的线的ESD阈值低于特征尺寸较大的线的ESD阈值。在显微镜下扫描网架,检查网架损伤情况。结果发现,当电压上升到17千伏并恢复到零时,观察到光栅的损坏。当施加一次7.5 kV电压时,没有观察到损伤,但当施加100次时,观察到网状损伤。这项研究证实,静电放电损伤是由附近的带电物体造成的,这与普遍认为的仅由带电物体造成的损伤形成了对比。该研究还表明,由于反复低水平暴露在十字线附近带电物体的边缘场中,所造成的累积损伤会使十字线受到足够的损伤,从而导致打印错误。
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引用次数: 27
Conductive materials for ESD applications: an overview 用于ESD应用的导电材料:概述
R. Rosner
Plastic resins, because of their low cost, versatility and ease of use, play an important role in many static control applications including packaging and work surfaces. A wide range of properties may be realized with plastics depending on the selection of the resin, filler or additive. This paper seeks to explain how these properties come about based on the chemical structure of the polymers. It also reviews the various way of imparting electrical conductivity on plastic resins through the use of antistatic agents, conductive fillers and intrinsically conductive polymers.
塑料树脂由于其低成本、多功能性和易用性,在包括包装和工作表面在内的许多静态控制应用中发挥着重要作用。根据树脂、填料或添加剂的选择,塑料可以实现各种各样的性能。本文试图根据聚合物的化学结构来解释这些特性是如何产生的。它还回顾了通过使用抗静电剂、导电填料和本质导电聚合物来赋予塑料树脂导电性的各种方法。
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引用次数: 65
HDA-level ESD testing of giant magnetoresistive (GMR) recording heads 巨磁阻(GMR)记录磁头的hda级ESD测试
D. Nordin
The drive-level electrostatic discharge (ESD) behavior of a recent model of a desktop disk drive is discussed. ESD events are simulated up to 30 kV using an ESD gun (IEC-801). The drives were evaluated at the final assembly level. The head disk assemblies (HDAs) were equipped with GMR heads and single ended preamplifiers. In a manner similar to evaluations of head stack assemblies (Wallash, 1999), the head disk assemblies were stressed using an ESD gun at various strategic points of the drive. The printed circuit boards were in place when directing ESD events to the base and removed to address the motor pins. A quasi-static tester (QST) was employed to evaluate the GMR head condition as described by the signal amplitude, resistance and pinned layer orientation. The QST was able to evaluate the GMR condition without any disassembly of the drive. Analyses of the GMR condition before and after ESD stress are discussed.
讨论了一种新型台式磁盘驱动器的驱动器级静电放电(ESD)行为。使用ESD枪(IEC-801)模拟30kv以下的ESD事件。驱动器在最终装配水平进行评估。磁头磁盘组件(hda)配备GMR磁头和单端前置放大器。采用类似于头盘组件评估的方式(Wallash, 1999),在驱动器的不同战略点使用防静电枪对头盘组件进行了应力测试。印刷电路板在将ESD事件引导到底座时到位,并移除以解决电机引脚的问题。采用准静态测试仪(QST)对GMR头部状态进行了评价,该状态由信号幅度、电阻和钉住层方向描述。QST能够在不拆卸驱动器的情况下评估GMR状况。讨论了ESD应力前后GMR状态的分析。
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引用次数: 4
期刊
Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000 (IEEE Cat. No.00TH8476)
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