M. A. Pourghaderi, A. Pham, S. Kim, Hyein Chung, Zhengping Jiang, H. Ilatikhameneh, Hong-hyun Park, Seonghoon Jin, Jongchol Kim, Won-Young Chung, U. Kwon, W. Choi, Dae Sin Kim, S. Maeda
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引用次数: 2
Abstract
Deterministic Boltzmann-transport solver has been integrated in performance analysis of logic cells. Employing universal-swing-factor (USF) approach, our setup accurately entails quasi-ballistic transport effects. The injection current and carrier mean free path (MFP) have been extracted for various channel dimensions and interface qualities. The resulting database is used to study candidate architecture for logic nodes. In particular, performance of ring oscillator (RO) with tapered FinFET is presented. For a given junction profile and contact-poly-pitch (CPP), the optimum gate-length (Lg), spacer thickness and contact-CD (CCD) are evaluated. The feasible gain by lowering the spacer k-value and contact resistance is also reported.
确定性玻尔兹曼输运求解器已被集成到逻辑单元的性能分析中。采用通用摆动因子(USF)方法，我们的设置准确地包含准弹道输运效应。提取了不同通道尺寸和界面质量的注入电流和载流子平均自由程(MFP)。得到的数据库用于研究逻辑节点的候选体系结构。重点介绍了锥形FinFET环形振荡器(RO)的性能。对于给定的结型和接触-多节距(CPP)，评估了最佳栅长(Lg)、间隔厚度和接触- cd (CCD)。本文还报道了降低间隔k值和接触电阻的可行增益。
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