{"title":"Wafer level electromigration testing on via/line structure with a poly-heated method in comparison to standard package level tests","authors":"H. Yap, K. Yap, Y. Tan, K. Lo","doi":"10.1109/IPFA.2003.1222742","DOIUrl":null,"url":null,"abstract":"In this study, we present data from alternative wafer level EM technique, poly-heated electromigration test on via chain structure. We show that there is a good correlation between conventional package level and poly-heated via test. We also present real case studies to illustrate poly-heated via test is an effective tool for process evaluation and monitoring.","PeriodicalId":266326,"journal":{"name":"Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2003-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2003.1222742","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this study, we present data from alternative wafer level EM technique, poly-heated electromigration test on via chain structure. We show that there is a good correlation between conventional package level and poly-heated via test. We also present real case studies to illustrate poly-heated via test is an effective tool for process evaluation and monitoring.