Atmospheric Pressure Airmicroplasma Ionization Source for Chemical Analysis Applications

19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI:10.1109/MEMSYS.2006.1627815

J. Wright, R.A. Miller, E. Nazarov

引用次数: 7

Abstract

An atmospheric pressure microplasma ionization source operating in ambient air and nitrogen is presented. Utilizing planar dielectric barrier discharge configuration, low power operation (< 250 mW) and long continuous operating lifetime (> 5000 hours) is demonstrated. Fitting of nitrogen rotational spectroscopy measurements indicate the microplasma operates at ambient temperature. Ion intensity and signal-to-noise data generated by the microplasma are compared to those produced from a 5 mCi,63Ni foil, a radioactive source widely used in chemical detection equipment. End of life failure mode is discussed.

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大气压空气微等离子体电离源在化学分析中的应用

介绍了一种大气压微等离子体电离源，工作环境为空气和氮气。利用平面介质阻挡放电结构，证明了低功率(< 250 mW)和长连续工作寿命(> 5000小时)。氮气旋转光谱测量的拟合表明微等离子体在环境温度下工作。将微等离子体产生的离子强度和信噪比数据与5mci,63Ni箔产生的离子强度和信噪比数据进行比较，5mci,63Ni箔是一种广泛用于化学检测设备的放射源。讨论了寿命终止失效模式。

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19th IEEE International Conference on Micro Electro Mechanical Systems

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