{"title":"Simulation and dispatching systems for production fab management","authors":"Y. Ishii, N. Ito","doi":"10.1109/ISSM.2001.963007","DOIUrl":null,"url":null,"abstract":"Semiconductor manufacturing involves complicated operations, including repeated use of many types of equipment. Since the number of work-in-process (WIP) wafers is very large, in the tens of thousands, it is very difficult for operators to determine the priority of each product. Especially, without the use of information technology (IT), obtaining optimum use of equipment would be a near impossibility while maintaining the WIP balance. Many studies on the application of simulation dispatching to improve semiconductor fabs have been reported We customized part of a simulation/dispatching system based on operator expertise, implemented it, and obtained great improvements in our fabs.","PeriodicalId":356225,"journal":{"name":"2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2001.963007","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Semiconductor manufacturing involves complicated operations, including repeated use of many types of equipment. Since the number of work-in-process (WIP) wafers is very large, in the tens of thousands, it is very difficult for operators to determine the priority of each product. Especially, without the use of information technology (IT), obtaining optimum use of equipment would be a near impossibility while maintaining the WIP balance. Many studies on the application of simulation dispatching to improve semiconductor fabs have been reported We customized part of a simulation/dispatching system based on operator expertise, implemented it, and obtained great improvements in our fabs.
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