H. Kopola, J. Hiltunen, J. Hakkila, P. Karioja, T. Kololnoma, A. Karkkainen, J. Paaso, J. T. Rantala
{"title":"Design, fabrication and packaging of micro-optical components and systems","authors":"H. Kopola, J. Hiltunen, J. Hakkila, P. Karioja, T. Kololnoma, A. Karkkainen, J. Paaso, J. T. Rantala","doi":"10.1109/OMEMS.2000.879648","DOIUrl":null,"url":null,"abstract":"The system design concept of a multi-technological module is introduced. A direct patternable hybrid material is demonstrated with a diffractive axicon lens. First experimental results of a 527 nm microcavity organic LED are shown. Fabrication and packaging solutions of several optical and optoelectronic microsystems are presented.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879648","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The system design concept of a multi-technological module is introduced. A direct patternable hybrid material is demonstrated with a diffractive axicon lens. First experimental results of a 527 nm microcavity organic LED are shown. Fabrication and packaging solutions of several optical and optoelectronic microsystems are presented.