B. Courtois, J. Karam, S. Mir, M. Lubaszewski, V. Székely, M. Rencz, K. Hofmann, M. Glesner
{"title":"Design and test of MEMS","authors":"B. Courtois, J. Karam, S. Mir, M. Lubaszewski, V. Székely, M. Rencz, K. Hofmann, M. Glesner","doi":"10.1109/ICVD.1999.745160","DOIUrl":null,"url":null,"abstract":"This paper deals with design, simulation and test of MEMS (microelectromechanical systems). Both existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to CAD frameworks, testing and intellectual property (IP) issues.","PeriodicalId":443373,"journal":{"name":"Proceedings Twelfth International Conference on VLSI Design. (Cat. No.PR00013)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings Twelfth International Conference on VLSI Design. (Cat. No.PR00013)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICVD.1999.745160","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
This paper deals with design, simulation and test of MEMS (microelectromechanical systems). Both existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to CAD frameworks, testing and intellectual property (IP) issues.
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