{"title":"Fiber-optic accelerometer with micro-optical shutter modulation and integrated damping","authors":"B. Guldimann, P. Clerc, N. D. de Rooij","doi":"10.1109/OMEMS.2000.879665","DOIUrl":null,"url":null,"abstract":"A single mask, shutter modulated fiber-optic accelerometer with integrated squeeze film damping structures has been fabricated and characterized. Its mass suspended by four beams and containing the structures for squeeze film damping is displaced laterally under acceleration. Vertical shutters at both ends of the mass can move horizontally in the optical path between two self-aligned multimode optical fibers.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879665","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
A single mask, shutter modulated fiber-optic accelerometer with integrated squeeze film damping structures has been fabricated and characterized. Its mass suspended by four beams and containing the structures for squeeze film damping is displaced laterally under acceleration. Vertical shutters at both ends of the mass can move horizontally in the optical path between two self-aligned multimode optical fibers.
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