Simplified thru-only 4-port de-embedding method

Abstract

This paper presents a new simplified 4-port deembedding method using one thru dummy structure. In the proposed method, the probe pads and feeding lines, are acquired and decomposed from measurement of a thru dummy. The method does not rely on an equivalent-circuit model. Thus good accuracy can be obtained due to no parameter extraction for a model. Besides, the feeding structure has fewer geometrical restriction compared to other 4-port de-embedding methods. Three test keys, which have different feeding structures, are fabricated to demonstrate the method. Experiments confirm that the proposed method is able to perform de-embedding properly. In addition, the thru dummy needed in the proposed de-embedding method consumes small area.