{"title":"Modeling And Characterization Of N/sup +/- And P/sup +/-polysilicon-gated Ultra Thin Oxides (21-26 /spl Aring/)","authors":"Lo, Buchanan, Taur, Han, Wu","doi":"10.1109/VLSIT.1997.623742","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":414778,"journal":{"name":"1997 Symposium on VLSI Technology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"41","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 Symposium on VLSI Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIT.1997.623742","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 41
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