{"title":"Spatially resolved optical characterization of photonic crystal slabs using direct evaluation of photonic modes","authors":"Y. Nazirizadeh, U. Geyer, U. Lemmer, M. Gerken","doi":"10.1109/OMEMS.2008.4607854","DOIUrl":null,"url":null,"abstract":"Transmission measurements with crossed polarization filters are performed in a confocal microscope setup for spatially resolved evaluation of photonic crystal modes. The homogeneity of samples fabricated with electron-beam lithography and laser interference lithography is investigated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607854","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Transmission measurements with crossed polarization filters are performed in a confocal microscope setup for spatially resolved evaluation of photonic crystal modes. The homogeneity of samples fabricated with electron-beam lithography and laser interference lithography is investigated.
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