Optimized design of the micromechanical gyroscope's elastic beam

Abstract

There will always have a greater residual stress in the processing process of the micromechanical gyroscopes straight elastic-beam. affecting the performance of micromechanical gyroscopes. According to the principle of stiffness equivalence, the original elastic-beam of the micromechanical gyroscope is improved to the beam of drive as the U-beam and sense as the carb-leg beam by the combination of theoretical analysis and finite element calculation. Compared with the ANSYS calculation results, The stiffness error and sensitivity of the driving beam are relatively small, the natural frequency error of the micromachined gyroscope is also within reasonable range; the interference mode differs from the working mode and The frequency of the drive and the sense match very well. The improved Micro-Electro-Mechanical System gyroscope satisfies the requirements of frequency matching and interference modal isolation. The improved design method provides theoretical guidance for the improvement and optimization of MEMS gyroscope.