K. Aasmundtveit, B. Q. Ta, Quoc Nguyen, Tormod B. Haugen, N. Hoivik, E. Halvorsen
{"title":"Direct integration of Carbon Nanotubes in Si microsystems — Towards truly integrated micro/nano systems","authors":"K. Aasmundtveit, B. Q. Ta, Quoc Nguyen, Tormod B. Haugen, N. Hoivik, E. Halvorsen","doi":"10.1007/978-3-319-21194-7_4","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":338701,"journal":{"name":"2013 Eurpoean Microelectronics Packaging Conference (EMPC)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Eurpoean Microelectronics Packaging Conference (EMPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-319-21194-7_4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}